About: http://webisa.webdatacommons.org/337803636

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Yet further, the method for manufacturing a semiconductor chip of claim 15 in accordance with claim 8 is characterized in that the semiconductor chip is a chip having a planar transistor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca