About: http://webisa.webdatacommons.org/337876706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the Si3N4 dielectric layer is too thick, it may damage the underlying material, such as silicon, by inducing stress.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com