About: http://webisa.webdatacommons.org/337902059

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Often times, in such vapor deposition systems, process gases, including film forming gases, reduction gases, dilution gases, etc., are introduced to the processing system through a gas injection system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com