About: http://webisa.webdatacommons.org/338094971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective film of the present invention is mostly removed in the PEB process and then, washed away together with a developer during a treatment with the developer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com