| http://www.w3.org/ns/prov#value | - The system according to claim 54, wherein the scan length of the at least one optical component in the interferometer is less than 1,000 ??M, such as less than 750 ??m, less than 500 ??m, less than 300 ??m, less than 200 ??m, less than 100 ??m, less than 75 ??m, less than 50 ??m, less than 30 ??m, less than 20 ??m, less than 10 ??m.
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