About: http://webisa.webdatacommons.org/338243429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film thickness of this polycrystalline silicon film 5 is for example about 20 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com