About: http://webisa.webdatacommons.org/338429307

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These steps include operations such as deposition, etching, sputtering and diffusion.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr