About: http://webisa.webdatacommons.org/338468558

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a technique commonly used in the manufacture of semiconductor materials to produce exceptionally fine and sharp patterns in semiconductor materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com