About: http://webisa.webdatacommons.org/338695401

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first liner insulating layer 215 may be formed of a material including an oxide layer, and a thickness of the first liner insulating layer 215 may be 80 to 120 ???.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com