| http://www.w3.org/ns/prov#value | - The attractive force of the electrostatic chuck is expressed by the following equation: ##EQU1## where K is a constant, n the dielectric constant of the dielectric film 2, V the voltage impressed across the electrode 1 and the wafer 3, a the thickness of the dielectric film 2, and b the gap between the dielectric film 2 and wafer 3.
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