About: http://webisa.webdatacommons.org/338713874

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The vapor phase method as described herein includes a physical deposition, such as sputtering, or a chemical deposition, such as the plasma CVD method, can be employed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com