About: http://webisa.webdatacommons.org/338871413

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching may involve one or both of physical and chemical processes; with example etch processes including sputtering, reactive ion etching and wet chemical etching.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com