About: http://webisa.webdatacommons.org/338915907

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The isolation region opening may have a suitable isolating material, such as silicon oxide, grown, filled, or some combination of both, in the isolation region opening.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com