About: http://webisa.webdatacommons.org/338995480

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The microelectronic structure of claim 3 wherein the dielectric layer is a silicon-based dielectric layer deposited using low-temperature PECVD with a silane precursor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com