About: http://webisa.webdatacommons.org/33916235

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, a real-time control is considerably limited in application depending upon types of films on a wafer or measurement methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com