About: http://webisa.webdatacommons.org/339280363

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	intervals of 0.5 ??m, and then, an ozone-TEOS NSG film 133 having a thickness of for example 800 nm is formed on the whole surface as shown in FIG. 4B, voids (which occurred in the BPSG film) do not occur.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es