PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • FIGS. 8A-8G illustrate one possible method of forming an air gap or region between two conductive regions or elements, such as metal lines, in which the conductive regions are over-coated and thus isolated from direct contact with the air gap structures according to the present invention.
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