About: http://webisa.webdatacommons.org/339388248

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart showing the flow of the fabrication of a microdevice (e.g., a semiconductor chip such as an IC or an LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, or a micromachine).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au