About: http://webisa.webdatacommons.org/339419854

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Nitrides, carbides, oxynitrides, and oxycarbides of metals and semiconductors, such as titanium nitride, silicon nitride, silicon carbide, and silicon oxynitride are popular compositions for capping layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com