About: http://webisa.webdatacommons.org/339607232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the passivation film 1116, a single-layer or a lamination of an insulating film including a carbon film, a silicon nitride film, or a silicon oxynitride film is used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com