About: http://webisa.webdatacommons.org/339632874

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Using these distributions, in step S167, examine whether defects or clusters of defects that are cyclic across chips (shots) show a characteristic on-wafer distribution.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com