About: http://webisa.webdatacommons.org/339791969

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS devices are divided into the following four groups.Group 1 contains MEMS devices with no moving parts, such as DNA sequencers, microphones, and chemical sensors.
http://www.w3.org/ns/prov#wasQuotedFrom	hindawi.com