About: http://webisa.webdatacommons.org/339911609

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For forming the n-type collector buried layer 5, first, an oxide film (not shown) is formed on the p-type semiconductor substrate 1 by heat oxidation to a thickness of for example about 300 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr