About: http://webisa.webdatacommons.org/340191956

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, the insulating film 25A is a non-organic insulating film such as a silicon oxide film, a silicon nitride film or the like prepared by the plasma CVD process, and is 1.5 ??m thick.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com