About: http://webisa.webdatacommons.org/340265638

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Contact holes were formed in the interlayer dielectric 216, and electrodes 217 to 221 were formed by using a metallic material, for example a multilayered film of titanium nitride and aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es