About: http://webisa.webdatacommons.org/340295570

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, this particular process is especially unique, in that both sides of the planarizing layer would be contoured or shaped before the planarizing layer was deposited onto a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es