About: http://webisa.webdatacommons.org/340482735

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, a film mainly containing silicon is formed by a known CVD method, and is then patterned thereby to form a gate electrode 207.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com