About: http://webisa.webdatacommons.org/340588128

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, the deposition of aluminum (Al) is obstructed by gases discharged from a dielectric material such as BPSG constituting the upper dielectric layer 23, so that the step coverage of the Al layer is deteriorated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com