About: http://webisa.webdatacommons.org/341149362

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7040965Sep
http://www.w3.org/ns/prov#wasQuotedFrom	google.com