About: http://webisa.webdatacommons.org/341264597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ng 3-D and TSVs.A role for heterogenous devices?By heterogeneous, Pellerin was referring to connecting logic with, say, optoelectronic or other devices that require a different material technology.
http://www.w3.org/ns/prov#wasQuotedFrom	cas.cn