About: http://webisa.webdatacommons.org/341452617

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Once the halogen-doped silicon oxide layer is planarized, openings or apertures for interconnect features, such as contacts and vias, are etched in the halogen-doped silicon oxide layer (step 210).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es