About: http://webisa.webdatacommons.org/341464788

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In association with this increase, a so-called local clean system has been employed in which electronic substrates such as semiconductor wafers are set in a portable closed container when conveyed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au