About: http://webisa.webdatacommons.org/341499363

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition to the above prior art process, deep subcollector regions can be formed by high-energy implantation of an n-type dopant such as phosphorus (P), which is masked utilizing a thick resist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com