PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Further, there is a competing issue that attempts to increase the doping of the gate electrode at the electrode/dielectric interface which enhances the risk of dopant diffusion through the gate dielectric and into the channel, particularly for boron doped gates.
http://www.w3.org/ns/prov#wasQuotedFrom
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