About: http://webisa.webdatacommons.org/341896902

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A separate stage is sometimes provided to position the semiconductor wafer or other workpiece.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com