About: http://webisa.webdatacommons.org/341978196

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Plasma processing methods are used in the fabrication of semiconductor devices, such as integrated circuits, and other types of substrates, such as micro-electro-mechanical (???MEMs???) substrates to achieve a variety of results.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es