About: http://webisa.webdatacommons.org/34201152

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, this stored data need not represent an uncompleted/completed process step, but may represent other information, such as the part number or mask revision of the device, that can affect the manufacturing process flow.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca