About: http://webisa.webdatacommons.org/342053332

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the exemplary cluster 102 identifies the wafers 104 using the OCR system 144, other techniques may be used to identify the wafers 104, such as for example, location within the cassette 124, or other methods as are known.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com