About: http://webisa.webdatacommons.org/342184136

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After this, the resist pattern 401 is removed using a stripping agent such as acetone.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es