About: http://webisa.webdatacommons.org/342256213

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the semiconductor component being fabricated is an interconnect, the substrate can comprise a semiconductor material such as monocrystalline silicon, germanium, silicon-on-glass, or silicon-on-sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com