About: http://webisa.webdatacommons.org/342643485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is to be appreciated that although polishing is preferred in the present invention due to the extremely smooth and planar topography that results, other methods such as plasma etch back can be utilized to expose disposable post 204.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com