About: http://webisa.webdatacommons.org/342677876

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At 910, the process identifies material properties for the resist film including enthalpy of reaction, thermal conductivity, density, and heat capacity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com