About: http://webisa.webdatacommons.org/342687893

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this time, by including ammonia, nitrogen, or N2O in an atmosphere of the chamber, an amorphous semiconductor film containing nitrogen can be formed.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com