About: http://webisa.webdatacommons.org/342691613

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is even more difficult to form through holes, such as contacts and vias, in insulating layers having such small geometries, due to proximity effects.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com