About: http://webisa.webdatacommons.org/342995988

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	llel to a major surface of said substrate, further including a trench formed through said silicon-on-insulator region. 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr