| http://www.w3.org/ns/prov#value | - Alternatively, the circuits may be formed prior to formation of the rib 108, 312, 408, 512, 624, 724, 880, 980 and may be protected from etching in a similar manner to which the rib itself is protected during etching, for example by a resist layer or a metallic masking layer which is later removed by processes such as sputtering, plasma etching or wet chemical etching.
|