About: http://webisa.webdatacommons.org/343294402

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An electrode material such as aluminum is deposited on the whole surface including the contact holes to a thickness of 1 ??m at 150??? C. by sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com