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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another method is to deposit an insulating material, such as Si3 N4, or polyimide, onto the substrate 44 to a desired thickness (e.g., 500??? to 2 ??m).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com