About: http://webisa.webdatacommons.org/343305927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An electrically conductive material such as a metal is deposited into the first contact hole to form a first contact plug 114 in the first contact hole.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com