About: http://webisa.webdatacommons.org/343380857

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an anodic arc vapor deposition system, a solid material such as silicon is heated in a vacuum cell so as to release silicon vapor in the vacuum cell.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com